Uncertainty-Enabled Design of an Active MEMS Valve for a High-Pressure Micro Gas Analyzer – A Project for IMSM 2012

Jordan Massad
Sandia National Laboratories
Albuquerque, NM

Ralph C. Smith
Department of Mathematics
North Carolina State University
Raleigh, NC

Project Description

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1. P. Galambos et al., Low Leak Rate MEMS Valves for Micro-Gas-Analyzer Flow Control

2. P. Galambos et al., Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-Analyzer

3. M. Allen, J. Massad et al., Input and design optimization under uncertainty to minimize the impact velocity of an electronically actuated MEMS Switch

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